Patentinformationen für ZYGO Produkte


Optische
Profilometer

5,784,164
6,597,460
6,775,006
6,822,745
6,989,905
7,061,623
7,068,376
7,142,311
7,177,029
7,298,494
7,321,431
7,324,210
7,428,057
7,446,882
7,456,975
7,468,799
7,522,288
7,586,620
7,616,323
7,889,355
7,933,025
7,948,637
7,952,724
8,045,175
8,107,085
8,698,891
8,780,334
9,025,162
9,599,534
9,658,129
9,798,130


Laser-
Interferometer

6,359,692
6,643,024
6,781,700
6,804,011
6,879,402
6,882,432
6,924,898
6,972,849
6,995,848
7,218,403
7,612,893
7,710,580
7,796,273
7,796,275
7,948,638
7,948,639
8,045,175
9,103,649

Positionsverschiebungsensoren

5,767,972
5,917,844
5,970,077
6,157,660
6,452,682
6,597,459
6,950,192
6,975,406
7,428,685
7,542,147
7,576,868
7,636,166
7,639,367
7,697,195
7,826,064
8,300,233
8,670,127
8,885,172
8,913,226
9,115,975
9,146,093